Patent · US Active

High-precision synchronization of pulsed gas-discharge lasers

US8411721B2 · kind B2 · utility

0Cited by

5References

19Claims

0Family size

Assignee

Coherent, Inc. · US

Inventors

Andreas Targsdorf · Gardelegen, DE
Rainer Desor · Bovenden, DE

Key dates

Filing date	Jul 2, 2012
Grant date	Apr 2, 2013
Priority date	—
Expiry date	Jul 2, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/2383
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.