Temperature and humidity measuring device deployed on substrate
US8413505B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2010 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Aug 16, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.