Accelerometer
US8413511B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 28, 2011 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Dec 22, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0854
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.