Sputter tray moving system
US8413796B2 · kind B2 · utility
0Cited by
16References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2009 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Jul 28, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6776
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A sputter tray moving system includes a sputter tray, a guide disposed under the sputter tray and including a groove, a pulley engaged with the groove of the guide and a buffer member disposed between the sputter tray and the guide. The sputter tray is moved when the pulley engaged with the groove of the guide is rotated in a rotation direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.