In-line film forming apparatus and manufacturing method of magnetic recording medium
US8414968B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 25, 2009 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Sep 21, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/677
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An in-line film forming apparatus capable of conveying a carrier at a high speed, increasing the exhaust capability within a film forming chamber, and easily realizing a high vacuum degree in a short time is provided. A conveyor mechanism has a linear motor drive mechanism which drives the carrier in a noncontact state, a horizontal guide mechanism which is provided so as to be able to contact a side portion of the carrier, and guides the carrier driven by the linear motor drive mechanism in a horizontal direction, and a vertical guide mechanism which is provided so as to be able to contact a lower end of the carrier, and guides the carrier driven by the linear motor drive mechanism in the vertical direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.