Sensor for detecting thermal radiation
US8415760B2 · kind B2 · utility
0Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2010 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Mar 23, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor having a monolithically integrated structure for detecting thermal radiation includes: a carrier substrate, a cavity, and at least one sensor element for detecting thermal radiation. Incident thermal radiation strikes the sensor element via the carrier substrate. The sensor element is suspended in the cavity by a suspension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.