Micro electrical mechanical magnetic field sensor utilizing modified inertial elements

US8418556B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Po-Jui Chen · Taichung, TW
• Martin Eckardt · Stuttgart, DE
• Axel Franke · Ditzingen, DE

Key dates

• Filing date: Feb 10, 2010
• Grant date: Apr 16, 2013
• Expiry date: Jul 3, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.