Reticle POD with sensor
US8418853B2 · kind B2 · utility
4Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2011 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | May 15, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67353
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.