Non-contact transport apparatus
US8419094B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2011 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | May 31, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A non-contact transport apparatus includes a housing and a plate which is fitted into a circular recess formed at a central portion in a lower surface of the housing. The housing is formed in an octagonal shape corresponding to the shape of a workpiece to be transported. In the plate, a plurality of nozzles are arranged radially at equal angular intervals. The nozzles include first nozzle grooves and second nozzle grooves having cross sectional areas that are determined in proportion to distances between a principal side of the housing and the nozzle and between an oblique side of the housing and the nozzle for making the flow rates of the pressure fluid through the first nozzle groove and the second nozzle groove different.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.