Method for inspecting defect of article to be inspected
US8422014B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2010 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | Apr 22, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0846
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.