Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus
US8423173B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2010 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | Aug 19, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67772
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.