Apparatus for thermal control in the analysis of electronic devices

US8424594B2 · kind B2 · utility

Assignee

• Presto Engineering, Inc. · US

Inventors

• Daniel C. Canfield · McMinnville, US
• John Joseph Harsany · Tualatin, US
• Frank Sauk · San Ramon, US
• William Joseph Yost, III · Brookline, US

Key dates

• Filing date: Dec 10, 2007
• Grant date: Apr 23, 2013
• Expiry date: Jul 15, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/311
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A heat spreader comprising a sheet of transparent diamond with an aperture therein that accommodates a solid-immersion lens (SIL). The heat spreader may be mounted within a clamp which allows the heat spreader to move freely across the Device Under Test (DUT) while maintaining a very high degree of planarity and contact between the diamond and the silicon substrate of the DUT. The DUT is secured to its electrical interface with a low profile clamp, the DUT may be held within the clamp by a mechanism that applies a pressure to the sides of the DUT package.