Device and method for measuring characteristics of An Ion beam
US8426824B2 · kind B2 · utility
11Cited by
0References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 30, 2009 |
| Grant date | Apr 23, 2013 |
| Priority date | — |
| Expiry date | Mar 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/2935
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
The present invention relates to a detector for measuring characteristics of an energetic particle beam generated by a radiation source, the detector including means to vary the incoming particle beam energy; a plurality of sensors arranged in parallel; and processing means capable of processing signals coming from said sensors in correlation with said energy variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.