Patent · US Active

Vertical Hall sensor and method of producing a vertical Hall sensor

US8426936B2 · kind B2 · utility

3Cited by

9References

9Claims

0Family size

Assignee

austriamicrosystems AG

Inventors

Rainer Minixhofer · Kufstein, AT
Sara Carniello · Graz, AT
Volker Peters · Celle, DE

Key dates

Filing date	Mar 24, 2010
Grant date	Apr 23, 2013
Priority date	—
Expiry date	Nov 20, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH10N52/01
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Through a main surface (10) of a semiconductor substrate (1) of a first type of conductivity, a doped well of a second type of conductivity is implanted to form a sensor region (3) extending perpendicularly to the main surface. The sensor region can be confined laterally by trenches (5) comprising an electrically insulating trench filling (6). The bottom of the sensor region is insulated by a pn-junction (20). Contacts (4) are applied to the main surface and provided for the application of an operation voltage and the measurement of a Hall voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.