Resonant frequency based pressure sensor
US8429978B2 · kind B2 · utility
7Cited by
92References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2010 |
| Grant date | Apr 30, 2013 |
| Priority date | — |
| Expiry date | May 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L23/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor for sensing a pressure of a process fluid includes a sensor body exposed to the pressure of the process fluid. The sensor body deforms in response to the pressure. A diaphragm suspended from the sensor body has a tension which changes in response to deformation of the sensor body. A resonate frequency of the diaphragm is measured. The measured resonant frequency is indicative of the line pressure of the process fluid and integrity of the isolation fill fluid system. In addition to measuring the resonant frequency, the oscillation mode itself can be used as a diagnostic tool to assess sensor health.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.