Apparatus and methods for preparation of high-purity silicon rods using mixed core means
US8430959B2 · kind B2 · utility
1Cited by
11References
12Claims
0Family size
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Key dates
| Filing date | May 11, 2007 |
| Grant date | Apr 30, 2013 |
| Priority date | — |
| Expiry date | Apr 7, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1004
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Disclosed are a method and an apparatus for preparing a polycrystalline silicon rod using a mixed core means, comprising: installing a first core means made of a resistive material together with a second core means made of silicon material in an inner space of a deposition reactor; electrically heating the first core means and pre-heating the second core by the first core means which is electrically heated; electrically heating the preheated second core means; and supplying a reaction gas into the inner space in a state where the first core means and the second core means are electrically heated for silicon deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.