Patent · US Active

Cubic nitride templates

US8431253B2 · kind B2 · utility

0Cited by

6References

3Claims

0Family size

Assignee

LOS ALAMOS NATIONAL SECURITY, LLC · US

Inventors

Anthony K. Burrell · Los Alamos, US
Thomas Mark McCleskey · Los Alamos, US
Quanxi Jia · Los Alamos, US
Alexander Mueller · Ergolding, DE
Hongmei Luo · Los Alamos, US

Key dates

Filing date	Jan 22, 2009
Grant date	Apr 30, 2013
Priority date	—
Expiry date	Aug 26, 2031

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC30B29/406
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A polymer-assisted deposition process for deposition of epitaxial cubic metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be used as templates for the development of high quality cubic GaN based electronic devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.