Wafer stage
US8436631B2 · kind B2 · utility
1Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2009 |
| Grant date | May 7, 2013 |
| Priority date | — |
| Expiry date | Mar 5, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/58
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform; and a support structure disposed substantially within the cavity for supporting a portion of the wafer; wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.