MEMS-based tunable filter
US8436698B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 2, 2009 |
| Grant date | May 7, 2013 |
| Priority date | — |
| Expiry date | Jul 24, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2007/008
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.