Scanning probe microscope
US8438661B2 · kind B2 · utility
0Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2007 |
| Grant date | May 7, 2013 |
| Priority date | — |
| Expiry date | Jun 26, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.