Method of determining multilayer thin film deposition on a piezoelectric crystal
US8438924B2 · kind B2 · utility
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6References
17Claims
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Key dates
| Filing date | Feb 3, 2011 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Jan 19, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0426
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.