Reticle carrier

US8439728B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Kevin S. Petrarca · Newburgh, US
• Donald F. Canaperi · Bridgewater, US
• Mahadevaiyer Krishnan · Hopewell Junction, US
• Rebecca D. Mih · Wappingers Falls, US
• Steven E. Steen · Titicus, US
• Henry Grabarz · Shelton, US
• Michael S. Hibbs · Colchester, US

Key dates

• Filing date: Oct 21, 2011
• Grant date: May 14, 2013
• Expiry date: Nov 11, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F1/50
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A reticle carrier for a polishing tool capable of accommodating a reticle includes a base plate with an obverse and reverse surfaces, a retaining ring secured to the obverse surface of the base plate forming a recess defined by the obverse surface of the rigid base plate and internal edges of the retaining ring. A reticle pad supports a reticle in the recess. The base plate and the reticle pad having an array of matching, aligned passageway holes therethrough for exhaustion of air from space between the base plate and a the reticle and for supply of air to that space so a vacuum can retain a the reticle in place on the reticle carrier under vacuum conditions and application of air under pressure can eject a reticle from the reticle carrier.