Hydrogen barrier for ferroelectric capacitors
US8440508B2 · kind B2 · utility
30Cited by
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3Claims
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Key dates
| Filing date | Mar 5, 2010 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Jan 23, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/688
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit containing a FeCap array. The FeCap array is at least partially surrounded on the sides by hydrogen barrier walls and on the top by a hydrogen barrier top plate. A method for at least partially enclosing a FeCap array with hydrogen barrier walls and a hydrogen barrier top plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.