Shared membrane thermopile sensor array

US8441093B2 · kind B2 · utility

Assignee

• Excelitas Technologies Singapore Pte. Ltd. · SG

Inventors

• Arthur John Barlow · Glasgow, GB
• Hermann Karagoezoglu · Wiesbaden, DE
• Jin Han Ju · Kirkland, CA
• Fred Plotz · Wiesbaden, DE
• Radu M. Marinescu · Rue du Bois des Loges, CA

Key dates

• Filing date: Apr 15, 2011
• Grant date: May 14, 2013
• Expiry date: Apr 15, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/023
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A thermopile sensor array is provided. The thermopile sensor array may include multiple pixels formed by multiple thermopiles arranged on a single common shared support membrane. A separation between the edge of the shared support membrane and the outermost thermopile(s) may be included to provide additional thermal isolation between the thermopile and an underlying silicon substrate.