Patent · US Active

Resonator element and resonator pixel for microbolometer sensor

US8441094B2 · kind B2 · utility

4Cited by

4References

15Claims

0Family size

Assignee

AIT AUSTRIAN INSTITUTE OF TECHNOLOGY GMBH · AT

Inventors

Hubert Brueckl · Wiener Neudorf, AT
Thomas Maier · Wien, AT

Key dates

Filing date	Feb 17, 2010
Grant date	May 14, 2013
Priority date	—
Expiry date	Feb 17, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01J5/0853
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A resonator element for the absorption and/or conversion of electromagnetic waves having a predefined wavelength, in particular infrared radiation having a wavelength of 2 μm to 200 μm, into heat, has a three-layer structure formed of a first metal layer, a second metal layer and a dielectric layer interposed between the two metal layers. The maximum lateral dimension of the layers is in the range between one quarter and a half of the predefined wavelength.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.