Shape measurement of specular reflective surface
US8441532B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2009 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Jul 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2513
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of measuring a shape of a specular reflective surface is provided. A pattern displayed on a surface of a target positioned at a target plane is produced from a specular reflective surface positioned at a measurement plane. An image of the reflection is recorded at an imaging plane. Positions of a plurality of points on the specular reflective surface relative to the imaging plane are determined. A first relation between feature positions on the image of the reflection and feature positions on the pattern is determined. The shape of the specular reflective surface is determined from a second relation involving a surface profile of the specular reflective surface and the first relation using the positions of the plurality of points as an initial condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.