Fast-scanning SPM scanner and method of operating same
US8443459B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2012 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Mar 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.