Rate-of-rotation sensor and method for operating a rate-of-rotation sensor
US8443666B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2008 |
| Grant date | May 21, 2013 |
| Priority date | — |
| Expiry date | Oct 6, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5755
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the first Coriolis element in a third direction running generally perpendicular to the first direction; characterized by the first Coriolis element being developed as balancing rocker.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.