Patent · US Active

Holding and turning device for touch-sensitive flat objects

US8444126B2 · kind B2 · utility

7Cited by

7References

19Claims

0Family size

Assignee

RUDOLPH TECHNOLOGIES GERMANY GMBH · DE

Inventors

Sönke Siebert · Mainz, DE
Dietrich Drews · Selzen, DE
Holger Wenz · Ludwigshafen, DE

Key dates

Filing date	Sep 28, 2007
Grant date	May 21, 2013
Priority date	—
Expiry date	May 14, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6838
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A holding/turning device for touch-sensitive flat objects, in particular wafers, with a distance positioning device which is arranged for holding the object perpendicular to the object plane at a defined distance, a lateral positioning device, arranged for positioning the object in the object plane and for rotating together with the object about a rotational axis perpendicular to the object plane, and with a rotational drive, coupled with the lateral positioning device, providing a driving force for rotating the object about the rotational axis, wherein the driving force can be applied to the object by the lateral positioning device. The distance positioning device is adapted for holding the object without involving contact, and is decoupled from the rotational drive in such a way that the distance positioning device does not rotate together with the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.