Mechanical resonating structures and methods
US8446078B2 · kind B2 · utility
8Cited by
29References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2010 |
| Grant date | May 21, 2013 |
| Priority date | — |
| Expiry date | Jul 16, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/0244
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.