Multiple frequency atomic force microscopy
US8448501B2 · kind B2 · utility
3Cited by
37References
19Claims
0Family size
Assignees
Inventor
Key dates
| Filing date | Oct 20, 2009 |
| Grant date | May 28, 2013 |
| Priority date | — |
| Expiry date | Apr 20, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.