Gate valve for a vacuum chamber and vacuum chamber
US8448918B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2008 |
| Grant date | May 28, 2013 |
| Priority date | — |
| Expiry date | Sep 9, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K3/182
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gate valve for a vacuum chamber comprises two carriers (5a) each connected to a frame structure providing an essentially plane front by two parallel links (6) and to an actuating rod (12a) by parallel levers (14). Upward motion of the actuating rods (12a) by a piston (17) causes, via the levers (14), upward motion of the carriers (5a) which is transformed into a circular motion by the links (6) where the carriers (5a) at the same time approach the front while remaining parallel to it, moving sealing plates (9) which are fixed to the carriers (5a) to an active position where they press against the front and seal openings (3) therein. Retraction of the piston (17) effects an inverse motion, whereby the sealing plates (9) are completely removed from the openings (3) and the latter made easily accessible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.