In-line furnace conveyors with integrated wafer retainers
US8449238B2 · kind B2 · utility
22Cited by
10References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2006 |
| Grant date | May 28, 2013 |
| Priority date | — |
| Expiry date | Feb 1, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6776
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In one embodiment, an in-line furnace includes a continuous conveyor configured to hold wafers at an angle relative to ground. The conveyor may have fixedly integrated wafer retainers configured to hold the wafers in slots. The conveyor may be formed by several segments that are joined together. Each of the segments may include a base and a set of wafer retainers formed thereon. The conveyor may be driven to move the wafers through a chamber of the furnace, where the wafers are thermally processed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.