Patent · US Active

Thermal imager using metamaterials

US8450690B2 · kind B2 · utility

7Cited by
7References
19Claims
0Family size

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Key dates

Filing dateOct 4, 2011
Grant dateMay 28, 2013
Priority date
Expiry dateOct 4, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J5/40
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus and method are disclosed for detecting terahertz radiation at room temperature. A detecting pixel includes a sub-wavelength split-ring resonator, and is mechanically coupled to (but thermally decoupled from) a substrate via a cantilever formed from two materials that have a significant mismatch in their thermal expansion coefficients. Incident radiation causes the split-ring resonator to resonate, thereby generating heat that is transferred to the cantilever, causing the cantilever to flex. An optical readout system includes a secondary light source, such as a laser, that shines on a reflective surface on the pixel, whereby a photodiode detects the reflected light and permits calculation of a relative deflection of the pixel in the nanometer range. An exemplary detector has a noise equivalent power rating of approximately 60 pW/√Hz.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.