Thermal imager using metamaterials
US8450690B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 4, 2011 |
| Grant date | May 28, 2013 |
| Priority date | — |
| Expiry date | Oct 4, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/40
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method are disclosed for detecting terahertz radiation at room temperature. A detecting pixel includes a sub-wavelength split-ring resonator, and is mechanically coupled to (but thermally decoupled from) a substrate via a cantilever formed from two materials that have a significant mismatch in their thermal expansion coefficients. Incident radiation causes the split-ring resonator to resonate, thereby generating heat that is transferred to the cantilever, causing the cantilever to flex. An optical readout system includes a secondary light source, such as a laser, that shines on a reflective surface on the pixel, whereby a photodiode detects the reflected light and permits calculation of a relative deflection of the pixel in the nanometer range. An exemplary detector has a noise equivalent power rating of approximately 60 pW/√Hz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.