Method and system for providing a full wrap-around shield using a frame configured wet etch in a damascene process
US8454846B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2010 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | May 31, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/315
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and system for fabricating magnetic recording transducer are described. The magnetic recording transducer has a main pole including a plurality of sides, an intermediate layer adjacent to the sides of the main pole, and a field region distal from the main pole. The method and system include providing at least one trench in the intermediate layer. The trench(es) are between the main pole and the field region. The method and system also include providing a stop layer. A portion of the stop layer resides in at least part of the trench(es) and on at least part of the field region. The method and system also include removing a portion of the intermediate layer using a wet etch. The stop layer is resistant to removal by the wet etch. The method and system also include depositing a full wrap-around shield layer on the main pole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.