Method for making structures with improved edge definition
US8455846B2 · kind B2 · utility
1Cited by
55References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2008 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | Sep 19, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70375
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method includes scanning a radiation beam with respect to a multi-photon curable photoreactive composition. The radiation beam includes a power sufficient to at least partially cure a volume of the multiphoton curable photoreactive composition. The method further includes modifying a characteristic of the radiation beam as the radiation beam is scanned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.