Piezoelectric sensor and method for making the same

US8456067B2 · kind B2 · utility

Assignees

• TSINGHUA UNIVERSITY · CN
• HON HAI PRECISION INDUSTRY CO., LTD. · TW

Inventors

• Xiang-Ming He · Beijing, CN
• Wei-Hua Pu · Beijing, CN
• Li Wang
• Jian Li · Shanghai, CN
• Jian Gao · Beijing, CN
• Jian REN · Beijing, CN

Key dates

• Filing date: Sep 21, 2010
• Grant date: Jun 4, 2013
• Expiry date: Apr 13, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42

Abstract

The present disclosure relates to a piezoelectric sensor. The piezoelectric sensor includes a polymer layer, a first metal layer, and a second metal layer. The polymer layer includes pyrolytic polyacrylonitrile. The first metal layer is located on a surface of the polymer layer. The first metal layer includes a first work function. The second metal layer is located on another surface of the polymer layer and includes a second work function different from the first work function. The present disclosure also relates to a method for making the piezoelectric sensor.