Apparatus and method of producing a light beam for an optical measurement instrument
US8456631B2 · kind B2 · utility
0Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2008 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | May 8, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/0205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for providing a light beam for use in a diffraction instrument (1) includes a device (10; 17; 28) for generating a light beam; and means (12, 21; 24) for shaping the light beam generated by the device (10; 17; 28), dimensioned, in use, to determine the beam shape, and including: an aperture (21; 25) and means (13; 24) for rejecting spatial frequency components above a certain range in the light beam. The apparatus further includes a spatial low-pass filter (14; 15; 26; 27) arranged to filter a beam provided by the beam shaping means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.