Patent · US Active

Method for calibrating an SRAF printing model

US8458626B1 · kind B1 · utility

8Cited by

3References

20Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Jaione Tirapu-Azpiroz · Hopewell Junction, US
Ramya Viswanathan · Wappingers Falls, US

Key dates

Filing date	Jan 20, 2012
Grant date	Jun 4, 2013
Priority date	—
Expiry date	Jan 20, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F1/36
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Printing risks for sub-lithographic assist features (SRAFs) can be predicted and minimized by employing an SRAF printing model, which is calibrated at a different image plane than an image plane at which a main feature model for predicting shapes of printed images of main features is calibrated. The optical model parameters of the main feature model and the SRAF printing model are calibrated separately such that the main feature model predicts the bottom CD and the SRAF printing model predicts the printing of SRAF features in a photoresist. Optionally, different degrees of printing risk can be assigned for different SRAF configurations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.