Scanning thermal twisting atomic force microscopy
US8458810B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Apr 6, 2012 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | Apr 6, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.