Microelectromechanical gyroscope with continuous self-test function
US8459093B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2010 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Nov 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.