Article transport facility
US8459442B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2012 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | May 29, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67736
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An inter-travel-paths transport device transports articles between a first article transfer location and a second article transfer location. It extends in a space upwardly of the article processing devices and connects the first and second article transfer locations. A first transport device transfers an article to or from an article transferring point by vertically moving its holding portion and of transferring an article to or from the first article transfer location by slidingly moving the holding portion at a position which overlaps with the first travel path portion. A second movement slide transport device vertically transfers an article to or from an article transferring point in the same manner with respect to the second travel path portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.