Method and apparatus for fabricating vertical deposition mask
US8459526B2 · kind B2 · utility
8Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2008 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Apr 11, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.