Method of manufacturing liquid crystal display device
US8461054B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2008 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Dec 10, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/40
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a liquid crystal display device which includes pixel electrodes and common electrodes which are alternatively arranged in each pixel defined on a substrate, including the steps of: forming a conductive film on the substrate; forming a mask layer, of which etching selection ratio is different from the conductive layer, on the conductive layer; forming a photo-resist pattern of a fixed pattern on the mask layer; forming a mask pattern, which has an undercut shape to the photo-resist pattern, by etching the mask layer by use of the photo-resist pattern as an etching mask; removing the photo-resist pattern; and etching the conductive film by use of the mask pattern as an etching mask, to provide at least any one of the common electrode and the pixel electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.