Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers
US8461284B2 · kind B2 · utility
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48References
34Claims
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Key dates
| Filing date | Nov 17, 2011 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Nov 17, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae SinH2n and SinH2n+2 as well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.