Adaptive processing constraints for memory repair
US8461479B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Dec 23, 2009 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Jun 24, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/50
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus and method for processing a plurality of semiconductor parts in a laser-based system adjusts a default recipe to account for work to be performed on at least one part of the plurality of parts. The work to be performed on a part is analyzed using the default recipe and a part-specific recipe including a modified parameter of the default recipe. The default or part-specific recipe is selected based on a desired processing result, and the selected recipe replaces the default recipe to perform the work using the laser-based system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.