Bulk acoustic wave resonator with adjustable resonance frequency and use of such a resonator in the field of telephony
US8461941B2 · kind B2 · utility
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5References
12Claims
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Key dates
| Filing date | Jan 15, 2008 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Nov 19, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator has an adjustable resonance frequency. A piezoelectric element is provided having first and second electrodes. A switching element is provided in the form of a MEMS structure which is deformable between a first and second position. The switching element forms an additional electrode that is selectively disposed on top of, and in contact with, one of the first and second electrodes. This causes a total thickness of the electrode of the resonator to be changed resulting in a modification of the resonance frequency of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.