Connecting structure for micromechanical oscillating devices

US8462415B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Stefan Pinter · Reutlingen, DE
• Andreas Duell · Stuttgart, DE
• Joerg Muchow · Reutlingen, DE
• Zoltan Lestyan · Martonvásár, HU

Key dates

• Filing date: May 12, 2011
• Grant date: Jun 11, 2013
• Expiry date: Oct 14, 2031

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0154
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.