Film forming apparatus and method of forming film
US8464652B2 · kind B2 · utility
1Cited by
2References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 9, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Sep 30, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133516
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A temperature adjustment unit is provided to a chamber for accommodating a stage, a discharge head, and a maintenance device. The temperature adjustment unit adjusts the temperature of the maintenance area at least while the transport device has the discharge head positioned in the maintenance area to be equal to or greater than the temperature of the drawing area while the transport device has the discharge head positioned in the drawing area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.