Substrate storage container
US8464872B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 20, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Apr 20, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D2585/86
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
When a lid (20) is attached to a substrate removal/insertion opening (2) in a container body (1), a placement piece forcible displacement means (22) forcibly moves a substrate placement piece (4), which is provided in a region in the vicinity of the substrate removal/insertion opening (2), to a displacement position which does not overlap with a disc-shaped substrate (W). Thus, even if the disc-shaped substrate (W) is increased in diameter, there is no risk of the stored disc-shaped substrate (W) coming into contact with the substrate placement piece (4) due to factors such as vibration or impact, thus the disc-shaped substrate (W) can be stored more safely.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.